High Performance Vacuum Metal Deposition Equipment CsI vacuum metallizer by Thermal Crucible

High Performance Vacuum Metal Deposition Equipment, CsI vacuum metallizer by Thermal Crucible

Keywords: high resolution, CsI: T1; thin scintillator films; X-ray imaging; vacuum deposition method, carbon layer post-deposition

CsI thin film deposition for X-ray Imaging devices is an advanced technique to evaporate CsI on the screen to give a high quality of imaging. With its high resolution performance, also widely used in security checking and inspection, high energy physics subjects , physics of nuclear energy areas etc.

The RTEP0913 thermal evaporation coating system was developed for CsI film deposition on X-ray imaging in high vacuum pressure environment. The CsI T1 scintillators ranging from 2 μm to 14 μm in thickness. The carbon layer film can be considered as post-deposition to improve high resolutions.

Cesium Iodide (CsI T1) Vacuum Deposition performance and characterizations

• Ultra- High Spatial Resolution of Imaging;
• Fast response for sharper imaging;
• Class leading edge-to-edge image areas;
• Optical absorb layers or reflector layers;
• Low patient X-ray dose;
• Suitable for CCD and CMOS devices, especially in medical industries.

Type:

l Vertical orientation, Cylinder, 1-door, front opening.

Design Features:

l  Ultra-high ultimate vacuum pressure : up to 9.0*10^-5 Pa;

l  Fast heating up devices for a good adhesion;

l  Proper high vacuum pump selection and pumping system to avoid hazard material's  exposed in the air;

l  Robust, compact and solid coating system;

l  High stability, working 960 hrs without stop.

l  Inficon Film Thickness Controller device to monitor the film thickness inline.

l  Exclusively crucibles design and selection for CsI deposition.

l  Substrates coating, max. size: 500*500mm

l  Advanced rack design concepts can load 2 pieces substrates per batch, highly enhance the production output.

Technical Specifications:

l Performance

1. Ultimate Vacuum Pressure:  better than 9.0*10^-5 Pa;

2. Operating Vacuum Pressure: 6.0*10^-4 Pa ~9.0*10^-4 Pa; 

Base Vacuum pressure: 3.0*10^-4 Pa

3. Pumping down Time:  from 1 atm to 2.0×10^-3 Pa≤25 minutes  ( room temperature, dry, clean and empty chamber)   

4. Deposition source: quartz crucible thermal evaporation

5. Operating Model:  Full Automatically /Semi-Auto/ Manually 

6. Heating: from room temperature up to max. 1000℃,
TFT glass substrate heating up time: from 0~250℃<40mins;

7. CsI deposition rate:  0～100nm/sec

8. CsI: T1 film thickness: up to 600μm

l Structure

The vacuum coating machine contains key completed system listed below:

1. Vacuum Chamber
1.1 Size:  Inner Diameter 900mm

         Inner Height: 1300mm

1.2 Material:  Vacuum Chamber  SUS304

            Door and flanges SUS304

       Chamber strengthen structure: SS41 mild steel, with painted finishing surface treatment.

 Chamber chassis  SS41 mild steel with painted finishing surface treatment.

1.3 Evaporation Shield :  SUS304

1.4 View Window: on chamber door

1.5 Vacuum Chamber Venting Valve (including silencer)

1.6 Door:  SUS304 material

2. Roughing Vacuum Pumping System:
 Oil rotary vane vacuum  pump + roots pump ( Germany Pfeiffer )

 

3. High Vacuum Pumping System:  

Magnetic Suspension Molecular Pump  ( Germany Pfeiffer )

4. Electrical Control and Operation System- PLC+ Touch Screen

4.1  Main circuit: None-fuse breaker switch, electromagnetic switch, C/T in series type

4.2  Evaporation Power

4.3  Evaporation Control System

4.4  Operation System:  Touch Screen + PLC, recipe control and data logging, Auto shutdown, auto evacuation, auto coating

4.5  Measuring System

     Vacuum Pressure : Vacuum Gauge: Pirani + Penning gauge + Full range vacuum gauge

     Temperature measuring device: Thermocouple

     Film thickness controller: Inficon brand, SQC-310   
 

4.6 Alarm System:  Compressed air pressure , Cooling water flow, Mis-operation 

4.7 Power Load Indicator:  Voltage indicator and load current indicator

5. Deposition System

5.1 Deposition source:  quartz crucible

5.2 Deposition material: CsI, Carbon

6.  Sub-System

6.1  Air Compressed Valve Control System

6.2  Cooling Water System:Water flow pipe and switch valve system

 Working Environment

Compressed Air:  5~8kg/cm2

Cooling  Water:  Water-In Temperature:  20~25℃, 200 Liter/min,
           Water-In Pressure: 2~3 kg/cm2,

Power: 3 Phase  380V 50Hz(60Hz), 65kVA,  average power consumption: 30KW 

Installation Area:  (L*W*H) 3000*200*2300mm

Exhaust: Vent for mechanical pumps

Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions.